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Electrical variable capacitor using symmetrical switch configuration for reducing switch voltage in RF plasma systems
Juhwa Min Beomseok Chae Yongsug Suh Jinho Kim Hyunbae Kim
Vol. 20, No. 6, pp. 1562-1572, Nov. 2020
10.1007/s43236-020-00129-0
Vol. 20, No. 6, pp. 1562-1572, Nov. 2020
10.1007/s43236-020-00129-0
ISSN : 1598 - 2092
eISSN : 2093 - 4718